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摘要
申请公布号
DE69529493(T2)
申请公布日期
2003.10.30
申请号
DE19956029493T
申请日期
1995.06.19
申请人
CANON K.K., TOKIO/TOKYO
发明人
WATANABE, TAKANORI;MIYAWAKI, MAMORU;INOUE, SHUNSUKE;KOCHI, TETSUNOBU
分类号
G02F1/1362;H01L27/12;(IPC1-7):G02F1/136
主分类号
G02F1/1362
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