WAFER ALIGNMENT APPARATUS FOR SEMICONDUCTOR MANUFACTURING EQUIPMENT

摘要

PURPOSE: A wafer alignment apparatus for semiconductor manufacturing equipment is provided to be capable of checking the wrenched extent of a transfer arm for improving the alignment of a wafer. CONSTITUTION: A wafer alignment for a semiconductor manufacturing equipment is provided with a wafer stage(3) for loading a wafer transferred by a transfer arm(1) and a calibration plate(120) installed at the upper portion of the wafer stage. At this time, the calibration plate is made of transparent material. At the time, an alignment calibration is marked at the calibration plate. The wafer alignment for a semiconductor manufacturing equipment further includes a plurality of support parts(110) for supporting the calibration plate and a setting part.