Lithographic apparatus and device manufacturing method

摘要

A means of providing pitch torque compensation for planar motors in which pitch torque is not inherently provided. The pitch torques for a given set of forces ideally required to be applied by each forcer in the planar motor may be calculated and summed. Correction forces for each forcer are determined such that the net effect of the corrections is equal and opposite to the pitch torques previously determined. <IMAGE>