发明名称 Method for electrostatic force bonding and a system thereof
摘要 A method for electrostatic bonding includes placing a first region of a first unit at least adjacent to a first region of a second unit. The first region of the first unit has trapped charge. A bond between the first region of the first unit and the first region of the second unit is formed by the electrostatic forces between the trapped charge and induced charge in the first region of the second unit. A system for electrostatic bonding includes a first unit having a first region with trapped charge and a second unit with a first region with induced charge. Electrostatic forces between the trapped charge in the first region of the first unit and the induced charge in the first region of the second unit bond the first and second units together.
申请公布号 US6638627(B2) 申请公布日期 2003.10.28
申请号 US20010016782 申请日期 2001.12.10
申请人 ROCHESTER INSTITUTE OF TECHNOLOGY 发明人 POTTER MICHAEL D.
分类号 B32B9/04;B81C3/00;G11B7/00;H01L;H01L21/30;H01L21/46;(IPC1-7):G11B7/00 主分类号 B32B9/04
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