发明名称 Method and apparatus for testing semiconductor dice
摘要 A method and carrier for testing semiconductor dice such as bare dice or chip scale packages are provided. The carrier includes a base for retaining a single die, an interconnect for establishing temporary electrical communication with the die, and a force applying mechanism for biasing the die and interconnect together. In an illustrative embodiment the base includes conductors arranged in a universal pattern adapted to electrically connect to different sized interconnects. Interconnects are thus interchangeable on a base for testing different types of dice using the same base. The conductors on the base can be formed on a planar active surface of the base or on a stepped active surface having different sized cavities for mounting different sized interconnects.In an alternate embodiment the carrier includes an interposer. In a first interposer embodiment, the interposer connects directly to external test circuitry and can be changed to accommodate different sized interconnects. In a go second interposer embodiment, the interposer connects to conductors on the base and adapts the base for use with different sized interconnects.
申请公布号 US6639416(B1) 申请公布日期 2003.10.28
申请号 US20010897592 申请日期 2001.07.02
申请人 MICRON TECHNOLOGY, INC. 发明人 AKRAM SALMAN;WOOD ALAN G.;HEMBREE DAVID R.;FARNWORTH WARREN M.
分类号 G01R1/04;G01R31/28;(IPC1-7):G01R31/02 主分类号 G01R1/04
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