发明名称 |
Silicon micromachined optical device |
摘要 |
An apparatus at least partially intercepts a plurality of light beams propagating along a respective plurality of beam paths. The apparatus includes a single crystal silicon substrate and an array including a plurality of modules. Each module includes a reflector comprising single crystal silicon and a reflector surface lying in a reflector plane substantially perpendicular to the substrate surface. Each module further includes a reflector support which mounts the reflector to move substantially within the reflector plane with a displacement component along the surface normal direction of the substrate surface. Each module further includes a reflector driver responsive to electrical current to selectively move the reflector between a first position and a second position.
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申请公布号 |
US6639713(B2) |
申请公布日期 |
2003.10.28 |
申请号 |
US20010843024 |
申请日期 |
2001.04.25 |
申请人 |
UMACHINES, INC. |
发明人 |
CHIU CHEN-WEI;AVAKIAN ARAMAIS;TSAO TOM;JIANG FUKANG;DICKSON JEFF;TAI YU-CHONG |
分类号 |
B81B3/00;B81C99/00;G02B6/35;(IPC1-7):G02F1/29;G02B26/08;G02B6/26;G02B6/42 |
主分类号 |
B81B3/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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