| 摘要 |
PROBLEM TO BE SOLVED: To provide a device and a method for drying a coating film in which heat convection generated in heat drying is suppressed, nonuniform film-thickness and surface-roughness caused by air-worked pattern and uneven hot air supply are restrained for improvement of the film thickness, in a process of heat drying after formation of a film containing solvent. SOLUTION: The film containing solvent is formed on a substrate placed on a heating plate (hot plate) installed in the atmosphere. In the film drying process, a plate for suppressing heat convection is brought closely to the surface of the coating film. In this case, the distance between the plate and the film surface is 7 mm or less, and a target film-thickness is at least 30μm (during drying). COPYRIGHT: (C)2004,JPO
|
