FUNCTIONAL MEMBRANE, AND PROCESS AND APPARATUS FOR MANUFACTURING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a highly functional membrane through liquid phase epitaxy (LPE) wherein temperature characteristics of a membrane material comprising a metal or ceramic material are improved and a process and an apparatus for manufacturing the functional membrane wherein the membrane material showing excellent temperature characteristics can be easily and stably manufactured. SOLUTION: The functional membrane having a component composition that varies in the thickness direction is obtained by sequentially changing a film-forming temperature, either by directly and serially changing the temperature of a solution contacting a substrate or by sequentially moving the substrate vertically in a solution having a temperature gradient wherein the temperature is lower at deeper parts in a furnace, to change the component composition of the growing membrane in its thickness direction. COPYRIGHT: (C)2004,JPO