| 摘要 |
<P>PROBLEM TO BE SOLVED: To suppress the occurrence of particles and to reduce the cost by eliminating the scattering of a coating liquid from a substrate. <P>SOLUTION: Spin coating is carried out at the number of revolution in which the coating liquid is not scattered from the substrate to solve the problems of the occurrence of the particles and the cost elimination. It is preferable to use a method of spreading the coating liquid with a squeegee or the like, a method of supplying the coating liquid from a long narrow slit to the substrate to be coated or a method of supplying the coating liquid from a plurality of nozzles on the substrate to be coated to spread the coating liquid to a wide range. <P>COPYRIGHT: (C)2004,JPO |
