| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an ozone supplying apparatus having high availability, low equipment cost, and good versatility. <P>SOLUTION: A plurality of ozone application modules 21 and 22 are selectively freely connected to one ozone generating module 1 for generating an ozone gas to share the ozone generating module 1 to increase the actual availability and achieve the enlargement of versatility. A plurality of ozone application modules 21 and 22 can also be simultaneously operated by connecting the ozone generating module 1 with the ozone application modules 21 and 22 through an ozone distribution module to distribute ozone to a plurality of ozone application modules 21 and 22. <P>COPYRIGHT: (C)2004,JPO |
