| 摘要 |
PROBLEM TO BE SOLVED: To provide a treating liquid circulation type apparatus for removing a coating film on the surface of a substrate, in which high performance for removing the coating film and profitability, resource saving or reduction of the environmental load can be achieved at the same time by selecting the most suitable organic solvent as a treating liquid and connecting/attaching a small-sized distillation mechanism, particularly, a vacuum distillation unit to an organic coating film removing mechanism and a separate regeneration mechanism for making good use of the characteristics of the selected solvent is combined with the distillation mechanism. SOLUTION: The apparatus is composed of a chemical treating mechanism and a treating liquid recovering mechanism. The chemical treating mechanism contains a zone for dissolving and removing the organic coating film by selecting ethylene carbonate or propylene carbonate as the treating liquid having high removal performance and bringing the organic coating film into contact with the liquid of ethylene carbonate or propylene carbonate. The treating liquid recovering mechanism consists of a liquid circulating/regenerating means for treating the substrates successively with the treating liquid recovered by decomposing the coating film-derived organic matter contained in the treating liquid or waste liquid by ozone and then deaerating the dissolved ozone and a bypass regeneration means for withdrawing a part of the treating liquid which is circulated multiple times and regenerated with ozone, distilling the withdrawn treating liquid in the vacuum distillation unit to recover as the purified treating liquid and returning the purified treating liquid to the zone of the chemical treating mechanism. COPYRIGHT: (C)2004,JPO |
