发明名称 Method for fabricating a high voltage device
摘要 A high voltage device and a method for fabricating the same are disclosed, which improves voltage-resistant characteristics to protect against high voltage applied to a gate electrode. The high voltage device includes a semiconductor substrate having first, second and third regions, the first region having sidewalls at both sides, and the second and third regions having a height higher than that of the first region at both sides of the first region. A channel region is formed within a surface of the substrate belonging to the first region including some of the sidewalls. A first insulating film is formed on a surface of the first region including the sidewalls. Buffer conductive films are formed to be adjacent to the sidewalls of the first region and isolated from each other. A second insulating film is formed between the buffer conductive films to have a recess portion. A third insulating film is formed on an entire surface including the buffer conductive films. A gate electrode, insulated from lower layers by the third insulating film to fill the recess portion, is formed to partially overlap the buffer conductive films. Drift regions are respectively formed in the second and third regions to have a first depth, and source and drain regions are formed in the second and third regions to have a second depth less than the first depth.
申请公布号 US6638825(B2) 申请公布日期 2003.10.28
申请号 US20020132407 申请日期 2002.04.26
申请人 HYNIX SEMICONDUCTOR INC. 发明人 LEE DA SOON
分类号 H01L21/265;H01L21/336;H01L29/423;H01L29/51;H01L29/78;(IPC1-7):H01L21/336 主分类号 H01L21/265
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