| 摘要 |
PROBLEM TO BE SOLVED: To provide a medical ceramic-coated needle which has an excellent insulation without adverse influence on cells around a puncture needle stitched to a collected tissue piece and a lesional part. SOLUTION: When the outer surface and the inner surface of the needle made of a metal are each coated with an insulating ceramic film having a resistivityρof 10<SP>5</SP>Ωm or more by using a magnetron sputtering method, as a sputtering target, at least one type selected from the group consisting of nitrides, carbides or oxides of Al, B and Si is used, a magnet for forming a high plasma atmosphere and an RF unit are disposed around the target, and the insulating ceramic film is coated while preventing an abnormal discharge. COPYRIGHT: (C)2004,JPO
|
