| 摘要 |
A vibration displacement sensing system comprises a piezoelectric substrate, first- and second comb-shaped electrodes, a counter electrode, and a signal analyzer. When input electric signals are applied between the first comb-shaped electrode and the counter electrode, longitudinal waves are radiated into a medium, and reflected at a material in the medium. If the material vibrates in response to times Ti, reflected longitudinal waves are detected between the second comb-shaped electrode and the counter electrode as delayed electric signals Di in accordance with distances Zi between the counter electrode and the material. In this time, the distances Zi correspond with the times Ti, respectively. Electrical coupled-signals from the input electric signals and the delayed electric signals Di interfere respectively, so that respective interference signals Ri occur. A vibration displacement caused by the material is estimated from the interference signals Ri.
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