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发明名称
SEMICONDUCTOR LOAD PORT ALIGNMENT DEVICE
摘要
申请公布号
AU2003224873(A1)
申请公布日期
2003.10.27
申请号
AU20030224873
申请日期
2003.04.08
申请人
BROOKS AUTOMATION, INC.
发明人
PATRICK, ROONEY CONARRO;KEVIN, JAMES HARRELL;KAMRAN, MICHAEL FARIVAR-SADRI;GORDON, HAGGOTT BECKHART
分类号
G01D21/00;G01R31/26;H01L21/00;H01L21/68;(IPC1-7):G01D21/00
主分类号
G01D21/00
代理机构
代理人
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