| 摘要 |
FIELD: measurement technology, devices testing surface roughness. SUBSTANCE: invention is based on magnification of three-dimensional interference picture by microscope, on copying of preliminary holographic image of surface microrelief. Scanning indicator of electromagnetic field is employed for measurement. EFFECT: raised precision, increased number of feeling routes, reduced time of operational registration, possibility of examination of real picture of microrelief. 3 dwg
|
