| 发明名称 |
CARBON WIRE HEATING OBJECT SEALING HEATER AND FLUID HEATING APPARATUS USING THE SAME HEATER |
| 摘要 |
A carbon wire heating element sealing heater is provided. Therein, a carbon wire heating element using carbon fibers is sealed in a quartz glass member, wherein absorption water quantity of the carbon wire heating element is 2 × 10 -3 g/cm 3 or less. |
| 申请公布号 |
SG99417(A1) |
申请公布日期 |
2003.10.27 |
| 申请号 |
SG20030001428 |
申请日期 |
2003.03.24 |
| 申请人 |
TOKYO ELECTRON LIMITED |
发明人 |
NORIHIKO SAITO;HIROYUKI HONMA;HIROSHI MORI;EIICHI TOYA;TOMIO KONN;TOMOHIRO NAGATA;SUNAO SEKO;AKIRA OTSU;TAKANORI SAITO;KEN NAKAO;KAZUTOSHI MIURA;HARUNARI HASEGAWA;GEORGE HOSHI;KATSUTOSHI ISHI |
| 分类号 |
H01L23/34;H05B3/14;(IPC1-7):H05B3/14;H01L21/00;H05B3/10 |
主分类号 |
H01L23/34 |
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