| 摘要 |
PROBLEM TO BE SOLVED: To provide a cathode cartridge of an electroplating tester which can screen a cathode part other than the surface of an object to be plated from a plating liquid. SOLUTION: This cathode cartridge N comprises a cathode conductor 10 for conducting electricity to the surface Wa to be plated of a silicon wafer W which is an object to be plated, a first insulator 20 for covering the front side (the surface Wa to be plated) of the silicon wafer W and for holding the cathode conductor 10, and a second insulator 30 for covering the rear side (the reverse side of the surface Wa to be plated) of the silicon wafer W and for holding the silicon wafer W. The cathode part other than the surface Wa to be treated of the silicon wafer W is screened from the plating liquid by a first O-ring 22 fitted to the first insulator 20 and a second O-ring 32 fitted to the second insulator 30. COPYRIGHT: (C)2004,JPO |
