| 摘要 |
PROBLEM TO BE SOLVED: To easily perform the neutralization of a charged up sample in a short time without newly adding the equipment. SOLUTION: In this method of preventing the charge up of an electron microscope wherein the neutralization of the charged up sample is performed by applying the accelerating voltage to an electron gun and applying the primary electrons to the sample from the electron gun, a maximum value of the accelerating voltage of the primary electrons used in the past is applied as the accelerating voltage in starting the neutralization, and the landing accelerating voltage of the electron beam on the sample face is determined in an area wherein the secondary electron emitting efficiency of the sample is over 1, to emit the charged electrons to the sample, the accelerating voltage is gradually lowered from the neutralization starting voltage, and the accelerating voltage is continuously applied until the negatively charged sample is neutralized or positively charged. The neutralization terminating voltage for terminating the lowering of the accelerating voltage, is determined to be less than a minimum accelerating voltage as a result of the comparison of the accelerating voltages to achieve the secondary electron emitting efficiency of 1 on the plurality of samples in advance. COPYRIGHT: (C)2004,JPO
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