| 摘要 |
PROBLEM TO BE SOLVED: To provide an organometallic material accommodating cylinder having a structure that enables bubbling and effectively uses a material as much as possible in a state where the material runs short. SOLUTION: The organometallic material accommodating cylinder 10 is made to have a smaller horizontal cross sectional area in the vicinity of its bottom face where the lower end 2a of a tube 2 is positioned than those at other portions. For instance, a recess 15 is locally formed on the bottom face 14 of an organic metal material accommodating portion 13, or the accommodating portion 13 is formed so as to have a smaller inside diameter as it goes to the lower side, for positioning the lower end 2a of the tube 2. COPYRIGHT: (C)2004,JPO
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