| 摘要 |
PROBLEM TO BE SOLVED: To provide an excimer light irradiation device equipped with a long excimer light source enabling irradiation of a wide area, and also, provide an excimer light irradiation device enabling uniform irradiation of a wide area by providing an excimer lamp having a good luminous efficiency by reducing irradiation drop of a joining part as much as possible even arranging a plurality of excimer lamps on a same lamp tube axis. SOLUTION: The excimer light irradiation device has arranged an excimer lamp using excimer light emitting from an excimer molecule generated by discharging rare gas, and is equipped with a transmitter, an inverter and a transformer as a driving circuit of the excimer lamp. A plurality of excimer lamps are arranged closely on the same lamp tube axis, and a means for synchronizing frequency and phase of each excimer lamp at lighting are provided. COPYRIGHT: (C)2004,JPO |
