| 摘要 |
<P>PROBLEM TO BE SOLVED: To reduce gas generating amount of a target which is although liquid/ solid, and also, to improve conversion efficiency or generation efficiency of X-ray generating from the target. <P>SOLUTION: The laser plasma generating structure is equipped with a wedge- shaped core material 50 at a core axis of a target material spout 11 of a nozzle 10, and the laser plasma generating method is to make spouting a target material 20 at a cylinder having a hollow part from the target material spout 11 and to generate a hollow cylinder target 21 with a diameter ϕ and thickness τof a wall thickness part 22. Laser beams 30 hit the hollow cylinder target 21 so as to have approximately a diameter ϕ at a convergent irradiation point 40. The core material can help forming a hollow part 23 of the hollow cylinder target 21 by spouting gas by providing a gas spout at a tip part center. A surface of the wall thickness part 22 is irradiated uniformly at the convergent irradiation point 40 by providing a plurality of laser beams on a center axis of the hollow cylinder target 21 on a vertical surface with equal spaces and angles. <P>COPYRIGHT: (C)2004,JPO |
