| 摘要 |
PROBLEM TO BE SOLVED: To provide an impedance matching device which is an inexpensive in manufacturing cost, capable of analyzing with high accuracy the electric characteristic of an output terminal. SOLUTION: This device is equipped with an input side detector 2 for detecting information on a high-frequency power from a high-frequency power source connected to an input terminal 1a, a control part 3 for matching the impedance between the high-frequency power source and a load connected to the output terminal 1b by adjusting variable capacitors VC3, VC4 based on the detected information, an EEPROM 15 for storing the characteristic showing the relation of an output impedance Zo (the electric characteristic of the output terminal) to variable values of the variable capacitors VC3, VC4 measured beforehand, and an analysis part for analyzing the electric characteristic such as the output impedance Zo at the output terminal 1b based on an adjusted value and the characteristic stored in the EEPROM 15 when the variable capacitors VC3, VC4 are adjusted to have values for matching the impedance between the high-frequency power source and the load by a control part 3. COPYRIGHT: (C)2004,JPO
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