| 摘要 |
A metal diaphragm valve for use inter alia in semiconductor facilities. This metal diaphragm valve is so designed as to reduce the fluid resistance of the flui d path from the valve chamber to the outflow path of the body and allows a large quantity of fluid to flow in spite of its small size. The metal diaphragm valve of the present invention comprises a body 2 provid ed with an inflow path 6, a valve chamber 8 and an outflow path 7 and a metal diaphragm 3, driving means 4 and a ring-shaped groove 5, wherein the diameter D of the inflow path 6 is larger than the width W of the ring-shaped groove 5 and the effective cross- sectional area of the regions where the ring-shaped groove 5 and the outflow path 7 interse ct one another is larger than the transverse cross-sectional area of the outflow path 7.</S DOAB> |
