METHOD AND APPARATUS FOR ANALYZING BORIC ACID AND METHOD AND APPARATUS FOR MANUFACTURING ULTRAPURE WATER

摘要

PROBLEM TO BE SOLVED: To simply and accurately on-site analyze a boric acid in water containing the trace boric acid like an ultrapure water and to manufacture the ultrapure water having a high purity by utilizing this boric acid analyzing method. SOLUTION: A method for analyzing the boric acid comprises the steps of: adsorbing a complex formable compound by supplying a solution containing the boric acid and the complex formable complex formable compound to adsorption columns 20A, 20B; forming a boric acid complex by supplying the water to be analyzed to the columns; then supplying a desorbed liquid; and quantitatively analyzing the boric acid complex in the desorbed liquid. An apparatus for analyzing the boric acid is provided. A method for manufacturing the ultrapure water comprises the steps of: obtaining a boric acid concentration in deionized water in order to manufacture the ultrapure water by supplying water to be treated to an ion exchange column filled with an anion exchange resin, and deionizing the water; and monitoring the leakage of the boric acid from the ion exchange column based on its result. COPYRIGHT: (C)2004,JPO