| 摘要 |
PROBLEM TO BE SOLVED: To prevent adverse influence of a potential generated between a device frame earth and a secondary power source in a liquid-sealed pressure sensor. SOLUTION: In a pressure detection element 10, hermetic glass 13 is hermetically fixed to a central opening part 12 of an element housing 11 formed of metal. A lead pin 14 for leading an electric signal from a sensor chip 18 to the outside and a sensor chip mounting glass member 16 holding the sensor chip 18 are arranged in the hermetic glass 13. A metallic diaphragm 20 is fixed in the upper side opening edge part of the housing 11, and consequently, the liquid-sealed pressure sensor is constructed. A cylindrical space surrounding the sensor chip 18 is formed of a metallic lower plate 51 and a metallic member 52 and connected to a lead pin 14-1 connected to a zero potential of an electronic circuit mounted to the sensor chip 18. In this way, the electronic circuit on the sensor chip 18 is not unfavorably affected by a potential generated between the metallic diaphragm 20 and the sensor chip 18. COPYRIGHT: (C)2004,JPO
|
