| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method for manufacturing an infrared detection element at a low cost with a good yield and to provide the infrared detection element and an ear type clinical thermometer having it. SOLUTION: This manufacturing method for the infrared detection element is provided with a thermopile formation process for forming a plurality of thermocouples 14 each having a hot contact 17 and a cold contact 18 on a semiconductor base board 2 and forming a thermopile 12 by connecting a plurality of thermocouples in series, a thin film part forming process for thinning the semiconductor base board matching the hot contact, and an infrared absorption part formation process for arranging an infrared absorption part 11 in compliance with the hot contact of the thermocouple. In the infrared absorption part formation process, the infrared absorption part is formed of a photosensitive material 43. COPYRIGHT: (C)2004,JPO
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