| 摘要 |
PROBLEM TO BE SOLVED: To provide an evaporation source device in which a thin-film forming material can be easily, precisely, and uniformly charged in a short period of time, and a film forming device using the same. SOLUTION: The evaporating source device to be arranged in a vacuum chamber has a crucible 2 comprising a disk-like base part in which an annular groove part 2A is provided and a truncated cone-shaped protrusion (a central part) 2B provided in the center of the base part, a rotary shaft 3 connected to the central part of the crucible 2, a vibrating device 4 mounted on the rotary shaft 3, and a motor 5 connected to the rotary shaft 3. When the thin-film forming material 15 is filled in the groove part 2A of the crucible, the crucible 2 is vibrated by the vibrating device 4 and the thin-film forming material 15 is charged into the top part of the central part 2B. COPYRIGHT: (C)2004,JPO
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