| 摘要 |
<p>Formation of a ceramic coating on a substrate (10) by electron beam-physical vapor deposition (EB-PVD) involves: placing a ceramic target rod (20) having lengthwise non-uniform composition in an EB-PVD chamber (14); introducing the substrate into the chamber (14); and sweeping the upper surface of the rod with an electron beam to melt the target and form of a vapor cloud (24) in the chamber. Formation of a ceramic coating on a substrate (10) by EB-PVD involves: placing a rod-shaped, composite target (20) formed from ceramic powders and having lengthwise non-uniform composition in an EB-PVD chamber; introducing the substrate (10) into the chamber (14); and sweeping the upper surface of the rod (20) with an electron beam to cause melting of the material and the formation of a vapor cloud (24) in the chamber under reduced pressure. The rod (20) has a number of superposed layers of different compositions. The composition within each layer is uniform across the cross-section of the rod (20). Each layer comprises zirconia and at least one oxide selected from oxides of nickel, cobalt. iron, yttrium, hafnium, cerium, lanthanum, tantalum, niobium, scandium, samarium, gadolinium, dysprosium, ytterbium and aluminum. The ceramic coating formed on the substrate (10) by progressive consumption of the rod (20) reflects the variation in the composition of the rod (20). Independent claims are given for: (a) the rod-shaped target; and (b) fabrication of the rod-shaped target.</p> |
