发明名称 METHOD FOR FORMING CARBONACEOUS FILM AND METHOD FOR MANUFACTURING MAGNETIC DISC
摘要 <P>PROBLEM TO BE SOLVED: To provide a carbonaceous thin-film having an improved recording density and an improved reliability against sliding of a magnetic disc. <P>SOLUTION: In the method for manufacturing the magnetic disc, an ion treatment of an element other than carbon is applied on a cathode 6 consisting of carbon, and arc discharge is generated on the surface of the cathode and a generated ion species is induced to a substrate 5 to form the thin-film by combining the carbon with the element other than carbon on the surface of the substrate. <P>COPYRIGHT: (C)2004,JPO
申请公布号 JP2003301257(A) 申请公布日期 2003.10.24
申请号 JP20020110298 申请日期 2002.04.12
申请人 HITACHI LTD 发明人 KOKADO YUICHI;FUJIMAKI SHIGEHIKO;ONO TOSHINORI
分类号 C01B31/02;C23C14/06;C23C14/24;G11B5/72;G11B5/84 主分类号 C01B31/02
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