发明名称 Electronic component production involves transferring a first substrate comprising a pattern onto a second substrate and producing an additional structure using volumes of the materials of the pattern as alignment markers
摘要 Fabrication of an integrated electronic component comprises: producing an initial structure (SI) incorporating volumes of respective materials forming a definite pattern (M) on a first substrate; transferring the pattern to a second substrate (200); and producing, on the second substrate surface, an additional structure by using the volumes of the materials of the pattern as alignment markers. Fabrication of an integrated electronic component comprises: (a) producing, on the surface of a first substrate (100), an initial structure (SI) incorporating volumes of respective materials, at least part of the volumes forming a definite pattern (M); (b) transferring at least a part of the initial structure (SI) comprising the pattern of the first substrate (100) to a second substrate (200); and (c) producing, on the surface of the second substrate (200), an additional structure by using at least some of the volumes of the materials of the pattern (M) as alignment markers. Independent claims are given for: (i) an integrated electronic component obtained by the invented process; and (ii) an electronic device comprising a transistor, or a diode, or a dynamic random access memory (DRAM) element.
申请公布号 FR2838866(A1) 申请公布日期 2003.10.24
申请号 FR20020005073 申请日期 2002.04.23
申请人 STMICROELECTRONICS SA 发明人 CORONEL PHILIPPE;LEVERD FRANCOIS;SKOTNICKI THOMAS
分类号 H01L21/02;H01L21/3213;H01L21/336;H01L21/68;H01L21/762;H01L21/8242;H01L23/544;H01L27/12;H01L29/78;H01L29/786;H01L51/00;H01L51/40;(IPC1-7):H01L21/70;H01L27/108 主分类号 H01L21/02
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