| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To solve a problem in a conventional SEM that an S/N ratio is lowered because of the measurement of the secondary electron, a long time is needed for measurement, and the information on the inside of a sample can not be obtained. <P>SOLUTION: This electronic microscope having an electron source, an electronic lens and an electron beam deflecting unit, further comprises an electron beam pulsing means and an acoustic wave measuring means, the energy of electrons entering into the sample is 1000 eV or less, and the measurement and examination of the inside of the sample are performed on the basis of the scanning information of the electron beam and the information of the detected sound. <P>COPYRIGHT: (C)2004,JPO</p> |
