INTERNAL FACE OBSERVATION METHOD AND DEVICE

摘要

PROBLEM TO BE SOLVED: To provide an internal face observation device capable of obtaining a good quality image enhanced in contrast between a defective part and a normal part. SOLUTION: Light projected from a light source 13 enters a circular cylinder body 16 from an end face of a guide rod 15. The light entering the tubular body 16 proceeds towards an internal circumferential face of the body 16. The light proceeding towards the internal circumferential face of the body 16 is diffused within a wall of the body 16 and permeates the body 16. The light which has permeated the body 16 is diffused from an outer circumferential face 161 of the body 16. A cone mirror 18 is fixed on a tip end of the body 16. The cone mirror 18 reflects an inner face 191 of a hole in an observation object 19. A mirror image on the cone mirror 18 is picked up by a CCD camera 11. COPYRIGHT: (C)2004,JPO