| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate inspection method capable of inspecting the existence or absence of a disconnection in a conductive pattern at a low cost in a short time. SOLUTION: In this substrate inspection method, the existence of a disconnection in a plurality of conductive patterns 21a-21c formed on an inspection object substrate P is inspected electrically. In the method, probes 3a-3c are brought into contact with lands 22b of the conductive patterns 21a-21c, and electron beams EL are emitted in vacuum toward the lands 22b of the conductive patterns 21a-21c, and currents flowing in the conductive patterns 21a-21c by emission of the electron beams EL are measured through the probes 3a-3c, to thereby inspect the existence or absence of the disconnection in the conductive patterns 21a-21c based on the measured values. COPYRIGHT: (C)2004,JPO
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