| 摘要 |
PROBLEM TO BE SOLVED: To provide surface-cleaning equipment and a surface-cleaning method wherein the removing efficiency of deposit can be improved without increasing a spraying speed of aerosol to a degree which damages a structure of an object to be treated in an aerosol cleaning method which does not use a chemical solution. SOLUTION: Aerosol 51 which includes floating fine particles is sprayed toward the surface to be treated of the object 10 to be treated by using an aerosol spouting means 5, laser light LB is irradiated into a cleaning chamber 2 by using a laser light irradiation means 4 via an optical window 22, and the fine particles contained in the aerosol 51 are liquefied or vaporized. By a fluidizing function caused by the liquefied or vaporized fine particle, the deposit stuck on the surface of the object 10 is removed. COPYRIGHT: (C)2004,JPO
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