| 摘要 |
PROBLEM TO BE SOLVED: To facilitate maintenance operation such as heater element replacement, and improve maintenability. SOLUTION: A vertical thermal treatment device is provided with a treatment vessel 4 for accommodating a number of objects w to be treated and performing thermal treatment, a cylindrical heater 6 for covering the periphery of the treatment vessel 4, a heater-setting portion 7 for setting the heater 6, and a housing 11 for accommodating the heater 6 from one side thereof for enabling maintenance. The heater 6 is provided with a plurality of heater elements 31 which are individually changeable, and a rotary support mechanism 40 is provided to the heater setting portion 7 for rotatably supporting the heater 6. COPYRIGHT: (C)2004,JPO
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