BEARING MECHANISM INTEGRATED WITH DETECTOR AND ACTUATOR EQUIPPED THEREWITH

摘要

PROBLEM TO BE SOLVED: To provide a bearing mechanism integrated with a detector allowing the highly accurate measurement of the displacement of a movable member, and an actuator equipped therewith. SOLUTION: The bearing mechanism 12 comprises a bearing 16 and the movable member 18 movably supported by the bearing. A measured part 26 is formed directly into the movable member. The detector 28 is opposed to the measured part to allow the measurement of the displacement of the movable member on the basis of the measured part. COPYRIGHT: (C)2004,JPO