发明名称 METHOD FOR CONNECTING SUBSTRATES AND COMPOSITE ELEMENT
摘要 The invention relates to a method for connecting substrates (202, 212) comprising electric, semiconductive, mechanical and/or optical components, in addition to a composite element. The method should be substantially material-independent with regard to the substrates to be connected and in addition be suitable for delicate substrates in particular, whilst at the same time exhibiting a high chemical and physical stability and/or creating a hermetic cavity. According to the invention, a raised frame (210a, 210b, 210c, 210d), in particular consisting of an anodically bondable glass, is deposited by vaporisation on one of the two substrates, in order to act as a connecting element.
申请公布号 WO03088347(A2) 申请公布日期 2003.10.23
申请号 WO2003EP03907 申请日期 2003.04.15
申请人 SCHOTT GLAS;CARL-ZEISS-STIFTUNG TRADING AS SCHOTT GLAS;CARL-ZEISS-STIFTUNG;MUND, DIETRICH;LEIB, JUERGEN 发明人 MUND, DIETRICH;LEIB, JUERGEN
分类号 G02B3/00;B81C1/00;B81C3/00;C03B19/00;C03C4/12;C03C14/00;C03C15/00;C03C17/02;C03C17/34;C03C27/02;C23C14/10;H01L21/027;H01L21/306;H01L21/3065;H01L21/312;H01L21/316;H01L21/50;H01L21/56;H01L21/768;H01L23/00;H01L23/02;H01L23/10;H01L23/29;H01L23/31;H01L23/48;H01L23/498;H01L51/50;H01L51/52;H05B33/04;H05B33/10;H05B33/24;H05B33/26;H05B33/28;H05K3/28 主分类号 G02B3/00
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