发明名称 FREQUENCY CHARACTERISTICS MEASURING METHOD AND DEVICE FOR ACCELERATION SENSOR
摘要 A metal bar (1) supported by a metal bar guide (30) so as to be tiltable at a proper angle is momentarily freed to be kept in a free fall condition, a missile (3) kept at the same angle as that of the metal bar is allowed to impinge to one end surface (2) of the metal bar during the freed period to generate and propagate an elastic wave pulse inside the metal bar, acceleration produced when the elastic wave pulse is reflected off the other end surface (22) of the metal bar is detected by a dc acceleration sensor (23), strain and motion at the end surface are measured by strain gages (25) provided on the side surface and/or by a laser interferometer (24), respective measurements are computed, the frequency response of the dc acceleration sensor is determined, and the frequency characteristics of the dc acceleration sensor are measured.
申请公布号 WO03087850(A1) 申请公布日期 2003.10.23
申请号 WO2003JP04132 申请日期 2003.03.31
申请人 NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE;UMEDA, AKIRA 发明人 UMEDA, AKIRA
分类号 H05B33/10;G01N3/30;G01N3/62;G01P15/08;G01P15/097;G01P21/00;G09F9/00;G09F9/30;H01L21/336;H01L23/12;H01L27/32;H01L29/786;H01L51/50;H05B33/14;(IPC1-7):G01P21/00 主分类号 H05B33/10
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