发明名称 METHOD FOR THE PRODUCTION OF STRUCTURED LAYERS ON SUBSTRATES
摘要 The invention relates to a method for the structured coating of a substrate (1) with at least one surface (2) for coating, which is suitable for the rap id and economical production of precise structuring. The method thus comprises the following steps: production of at least one negative structured first coating (3, 31, 32) on the at least one surface (2), deposition of at least one second layer (7, 71, 72, 73), which comprises a material with a glassy structure, on the surface (2) provided with the first coating (3, 31, 32) an d at least partial removal of the first coating (3, 31, 32).
申请公布号 CA2479823(A1) 申请公布日期 2003.10.23
申请号 CA20032479823 申请日期 2003.04.15
申请人 SCHOTT GLAS 发明人 MUND, DIETRICH;BIECK, FLORIAN;LEIB, JUERGEN
分类号 G02B3/00;B81C1/00;B81C3/00;C03B19/00;C03C4/12;C03C14/00;C03C15/00;C03C17/02;C03C17/34;C03C27/02;C23C14/10;H01L21/027;H01L21/306;H01L21/3065;H01L21/312;H01L21/316;H01L21/50;H01L21/56;H01L21/768;H01L23/00;H01L23/02;H01L23/10;H01L23/29;H01L23/31;H01L23/48;H01L23/498;H01L51/50;H01L51/52;H05B33/04;H05B33/10;H05B33/24;H05B33/26;H05B33/28;H05K3/28;(IPC1-7):H01L21/316;H01L21/310;H01L21/311 主分类号 G02B3/00
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