METHOD AND COMPOSITION FOR POLISHING BY CMP,申请号KR20037011765-传众专利搜索

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发明名称	METHOD AND COMPOSITION FOR POLISHING BY CMP
摘要
申请公布号	KR20030082969(A)	申请公布日期	2003.10.23
申请号	KR20037011765	申请日期	2003.09.08
申请人		发明人
分类号	B24B37/00;H01L21/304;C23F3/00;H01L21/321	主分类号	B24B37/00
代理机构		代理人
主权项
地址

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