发明名称 |
POSITION-SENSITIVE GERMANIUM DETECTORS HAVING A MICROSTRUCTURE ON BOTH CONTACT SURFACES |
摘要 |
The invention relates to a high-resolution detector used to measure charged particles in a surface area that is formed by an amorphous layer and a superimposed, structured metal layer, whereby the structure of the metal layer extends right into the amorphous layer. |
申请公布号 |
WO03088368(A2) |
申请公布日期 |
2003.10.23 |
申请号 |
WO2003EP03485 |
申请日期 |
2003.04.03 |
申请人 |
FORSCHUNGSZENTRUM JUELICH GMBH;PROTIC, DAVOR;KRINGS, THOMAS |
发明人 |
PROTIC, DAVOR;KRINGS, THOMAS |
分类号 |
G01T1/24;G01T1/161;G01T1/29;H01L31/0224;H01L31/115;H01L31/118 |
主分类号 |
G01T1/24 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|