发明名称 POSITION-SENSITIVE GERMANIUM DETECTORS HAVING A MICROSTRUCTURE ON BOTH CONTACT SURFACES
摘要 The invention relates to a high-resolution detector used to measure charged particles in a surface area that is formed by an amorphous layer and a superimposed, structured metal layer, whereby the structure of the metal layer extends right into the amorphous layer.
申请公布号 WO03088368(A2) 申请公布日期 2003.10.23
申请号 WO2003EP03485 申请日期 2003.04.03
申请人 FORSCHUNGSZENTRUM JUELICH GMBH;PROTIC, DAVOR;KRINGS, THOMAS 发明人 PROTIC, DAVOR;KRINGS, THOMAS
分类号 G01T1/24;G01T1/161;G01T1/29;H01L31/0224;H01L31/115;H01L31/118 主分类号 G01T1/24
代理机构 代理人
主权项
地址