| 摘要 |
<p>A stamper original for manufacturing a stamper on which a minute uneven pattern is formed with good precision even while omitting any Ni electro-forming that requires a long time and might cause defectives. A stamper original (11) comprises a substrate (1), semicrosslinking resist layer (2), and a pre-baked resist layer (3) formed in this order in a multilayer structure. The pre-baked resist layer (3) contains methoxymethylated melamine, and a bump can be easily formed by exposure and development (Fig. 1C).</p> |
