| 摘要 |
<p>An inclination sensor capable of measuring an inclination by utilizing piezo electric effect without selectively etching a substrate having piezoresistances formed therein, wherein the rear surface of the silicon substrate (1) having piezoresistances (R1) to (R4) formed therein is uniformly ground to a deformable thickness, both ends of the silicon substrate (1) are supported by a support member (2), and a weight member (3) is installed at the center of the silicon substrate (1) through a projected part (3a).</p> |
