Semiconductor device analysis system

摘要

A semiconductor device analysis system is provided. In a data analysis mechanism (2a) included in a data analyzing EWS, a failure generator (11) artificially generates failure shape data about the shape of a failure assumed to occur in an actual semiconductor device. An analysis database (9) stores therein failure shape recognized data provided from a failure shape recognizer (8) and the failure shape data provided from the failure generator (11). A data processor (10) performs a failure analysis process based on the failure shape recognized data and the failure shape data.