Device for detecting the angle of incidence of radiation on a radiation incidence surface

摘要

A device for detecting the angle of incidence of radiation on a radiation incidence surface (14) comprises at last two first pairs (36) of photodiodes comprising first photodiodes (30) arranged along a first axis (12) and connected in series in a pair-wise manner. Each of the first photodiodes (30) comprises a space-charge zone (32) having a space-charge zone face (34) oriented towards the radiation incidence face (14). Further, the device is provided with a a shading mask (46) arranged at a distance (44) above the space-charge zone faces (34) of the first photodiodes (30) and comprising radiation-transmitting areas (48). Each radiation-transmitting area (48) is assigned to the space-charge zone faces (34) of the two first photodiodes (30) of a first pair (36) of photodiodes. When viewed in the direction of the normal of the radiation incidence face (14), the degree of overlapping between a radiation-transmitting area (48) and its assigned space-charge zone faces (34) in the direction of the first axis (12) is different for at least two of the first pairs (36) of photodiodes. The device also comprises an evaluation unit (56) for monitoring the photocurrent and/or the photovoltage of each first photodiode (30) of each first pair (36) of photodiodes and for detecting, on the basis of a comparison of the photocurrents and/or the photovoltages, the angle of incidence under which the component of the radiation which in the projection is directed parallel to the first axis (12) impinges on the radiation incidence face (14).