| 发明名称 |
Acoustic wave sensor apparatus, method and system using wide bandgap materials |
| 摘要 |
An acoustic wave sensor to detect an analyte, the sensor comprising a piezoelectric material including a wide bandgap semiconductor material grown using plasma source molecular beam epitaxy.
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| 申请公布号 |
US2003196477(A1) |
申请公布日期 |
2003.10.23 |
| 申请号 |
US20020125031 |
申请日期 |
2002.04.17 |
| 申请人 |
AUNER GREGORY W.;ZHONG FENG;HUGHES CHANTELLE;SHREVE GINA;YING HAO |
发明人 |
AUNER GREGORY W.;ZHONG FENG;HUGHES CHANTELLE;SHREVE GINA;YING HAO |
| 分类号 |
G01N29/02;G01N29/24;G01N29/34;G11B5/855;H01F1/00;H01L21/20;H01L21/205;H01L31/00;(IPC1-7):G01N29/02;G01N29/00 |
主分类号 |
G01N29/02 |
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