| 摘要 |
A movable light beam is controlled and set within a tolerable range of a beam position A by using a galvano-mirror, and then a circuit offset relating to the beam position A is measured. With the circuit offset being subtracted, the movable laser beam is exactly controlled and set at the beam position A, and an output value DA from a sensor at that time is stored. Subsequently, an output value DB from the sensor is similarly stored in connection with a beam position B. An ultimate beam position of the movable laser beam M is controlled such that a difference between the output values DA and DB coincides with a difference between an output value DS of the sensor with respect to a stationary laser beam S and an output value DM of the sensor in connection with the movable laser beam M.
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