发明名称 |
Semiconductor process recording apparatus |
摘要 |
A semiconductor process recording apparatus comprises a buffer circuit and a endpoint recording device. The input terminal of the buffer circuit is connected to an external endpoint apparatus for receiving a first signal output from the endpoint apparatus. The output terminal of the buffer circuit is connected to the endpoint recording device for outputting a second signal representative of the first signal in response to the first signal. When receiving the second signal, the endpoint recording device outputs a feedback signal to the buffer circuit on the basis of the second signal. Because the feedback signal is blocked by the buffer circuit, the external endpoint apparatus is protected from the damage caused by the feedback signal, thereby greatly reducing the production cost and rate of semiconductor manufacturing.
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申请公布号 |
US2003196758(A1) |
申请公布日期 |
2003.10.23 |
申请号 |
US20020126192 |
申请日期 |
2002.04.19 |
申请人 |
WANG HUNG-HSIANG;CHEN WEI-CHEN;YU SHUENN-CHUAN;LIU PAN-KAI;LIN ANDY;LIU HSIN-CHEN |
发明人 |
WANG HUNG-HSIANG;CHEN WEI-CHEN;YU SHUENN-CHUAN;LIU PAN-KAI;LIN ANDY;LIU HSIN-CHEN |
分类号 |
H01J37/32;(IPC1-7):C23F1/00;H01L21/306 |
主分类号 |
H01J37/32 |
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