| 发明名称 |
Monolithic integrated crystal-structure-processed mechanical, and combined mechanicaland electrical devices, and methods and systems for making |
| 摘要 |
Monolithic integrated crystalline-structure-processed arrays of mechanical, and combined mechanical and electrical devices, and related systems and processing methods.
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| 申请公布号 |
US2003197214(A1) |
申请公布日期 |
2003.10.23 |
| 申请号 |
US20020131549 |
申请日期 |
2002.04.23 |
| 申请人 |
HARTZELL JOHN W. |
发明人 |
HARTZELL JOHN W. |
| 分类号 |
B81C1/00;B81C99/00;H01L21/20;H01L27/00;H01L27/108;(IPC1-7):H01L27/108 |
主分类号 |
B81C1/00 |
| 代理机构 |
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